مشخصات
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توضیحات
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ستون NICol UHR Non-Immersion FESEM میکروسکوپ الکترونی روبشی SEM مدل Apreo VS
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High-resolution field emission-SEM column, with high-stability Schottky field emission gun · Source lifetime 12 months
Auto bakeout, auto start, no mechanical alignments
Automated heated apertures
Continuous beam current control and optimized aperture
Double stage scanning deflection
Dual objective lens combining electromagnetic and electrostatic lenses
Beam current range: 1 pA to 400 nA
Landing energy range: 20 eV – 30 keV*
Accelerating voltage range: 200 V – 30 kV
User guidance and column presets
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رزولوشن در فاصله بهینه پرتو الکترونی میکروسکوپ الکترونی SEM مدل Apreo VS
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High-vacuum imaging At optimum WD:
0.8 nm at 30 keV STEM
1.0 nm at 15 keV
1.4 nm at 1 keV
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چمبر میکروسکوپ الکترونی روبشی SEM مدل Apreo VS
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Inside width: 340 mm
Analytical working distance: 10 mm
Ports: 12
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آشکارسازهای میکروسکوپ الکترونی SEM مدل Apreo VS
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Serial block face imaging detector; T1 segmented lower in-lens detector
T2 in-lens detector and ETD (Everhardt-Thornley)
IR-CCD
Additional detectors available
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سیستم خلاء میکروسکوپ الکترونی روبشی SEM مدل Apreo VS
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Complete oil-free vacuum system
1 × 220 l/s TMP
1 × PVP-scroll
2 × IGP
Chamber vacuum (high vacuum) < 6.3 × 10-6 mbar (after 72 hours pumping)
Evacuation time: ≤ 3.5 minute
low-vacuum mode
up to 50 Pa for charge compensation of nonconductive samples
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نگهدارنده نمونه میکروسکوپ الکترونی SEM مدل Apreo VS
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Standard multi-purpose holder, uniquely mounts directly onto the stage, hosts up to 18 standard stubs (Ø12 mm), three pre-tilted stubs, cross-section samples and two pre-tilted row-bar holders* (38° and 90°) and does not require tools to mount a sample
Each optional row-bar accommodates 6 S/TEM grids
Wafer and custom holders*
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کنترل سیستم میکروسکوپ الکترونی روبشی SEM مدل Apreo VS
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64bit GUI with Windows 7, keyboard, optical mouse
“Beam per view” graphical user interface concept, with up to 4 simultaneously active views
24-inch LCD display, WUXGA 1920 × 1200 pixels (second monitor optional)
Optional joystick
Optional manual user interface (knob board)
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پردازنده تصویر میکروسکوپ الکترونی SEM مدل Apreo VS
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Dwell time range from 25 ns – 25 ms
Up to 6144 × 4096 pixels (40k × 40k with MAPS)
File type: TIFF (8, 16, 24 bit), BMP or JPEG, standard
Single-frame or 4-view image display · SmartSCAN™ (256-frame average or integration, line integration and averaging, interlaced scanning)
DCFI (Drift Compensated Frame Integration) · Image registration
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الزامات نصب میکروسکوپ الکترونی روبشی SEM مدل Apreo VS
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Power:
– Voltage 100 – 240 V AC (-6%, +10%)
– Frequency 50 or 60 Hz (±1%)
– Consumption: < 3.0 kVA for basic microscope
Earth resistance < 0.1 Ω
Environment:
– Temperature (20 ± 3) °C
– Relative humidity below 80%
– Stray AC magnetic fields < 40 nT asynchronous, < 100 nT synchronous for line times, 20 ms (50 Hz mains) or 17 ms (60 Hz mains)
Minimum door size: 0.9 m wide × 1.9 m high
Weight: column console 980 kg
Dry nitrogen recommended for venting
Compressed air 4 – 6 bar, clean, dry and oil-free
System chiller
Acoustics: site survey required, as acoustic spectrum relevant
Floor vibrations: site survey required, as floor spectrum relevant
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نرم افزار میکروسکوپ الکترونی SEM مدل Apreo VS
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“Beam per view” graphical user interface concept with up to 4 simultaneously active views
MAPS™ for automatic acquisition of large volumes
Image registration
Navigation montage
Image analysis software
Undo / Redo functionality
User guidance
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